SEREN R301 Operator's Manual download pdf (Page 98)

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL

ANALOG INTERFACE CONNECTOR PIN LIST

PIN SIGNAL NAME DESCRIPTION

Measure monitor voltage with respect to pin 23 (REFRET).

12 FEEDBACK External feedback voltage signal. Analog input, 0 to +10.0VDC .

Use pin 16 or 17 or (GNDI) for return reference.

The RF Power Supply will automatically adjust its output power

to maintain the FEEDBACK signal’s magnitude at the same

level as the SETPOINT signal magnitude. The PROBE voltage

will be displayed on the front panel. The PROBE attenuation

factor can be configured from the front panel.

The external feedback signal is derived from a voltage probe

(RF or DC) located elsewhere in the plasma or process system.

Refer to the controls section for detailed instructions on how to

configure and use this mode.

Note: The feedback voltage polarity must match the setpoint

input’s (pin 13) polarity for proper operation of voltage control

mode. The RF Power Supply’s external feedback circuitry is not

designed to function with Negative (-) polarity signals applied to

this pin.

13 SETPOINT Power or Voltage setpoint input. Analog, high-impedance,

differential input with selectable 0 to +5.0VDC or 0 to +10.0VDC

range via front panel controls.

Refer to the controls section of the operator’s manual for

detailed instructions on how to configure and use this mode

NOTE: SETRET (pin 25) MUST

be referenced to common or

ground at the setpoint voltage source (system controller) or the

RF output power will behave erratically.

Refer to the Analog Setpoint Sensitivity subsection of the

appropriate model specification for setpoint sensitivity details.

NOTE: Feedback voltage range and polarity must match

setpoint voltage range and polarity for proper operation in

voltage control mode.

Pin 13 is the positive (+) input of the differential setpoint

amplifier.

Active only in ANALOG control mode.

14 MAINS INTLK 2

R101, L101, R301,

L301 only

A contact closure between pin 1 and pin 14 is required to allow

AC mains power to engage. An open circuit between pin 1 and

pin 14 disables AC mains power. 24VAC current loop, 100 mA

maximum current

This signal is active in Panel, Analog, or Serial control modes

NOTE:

Applicable to models R101, L101, R301, L301 only.

No Connection

R101MKII,

L101MKII,

No Connection

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Seren IPS Inc.

6100220000 Rev. 1.09

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SEREN R301 Operator's Manual Page 98

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