SEREN R301 Operator's Manual download pdf (Page 11)

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL

Radio Frequency Power Supply Features

Seren IPS Inc. RF Power Supplies are intended for use with radio frequency plasma processing

systems and radio frequency processing applications.

The RX01 and LX01-Series RF Power Supplies provide a level-controlled radio frequency

power output. Available frequencies are 100-460KHz (LX01 Series), 1.7-2.1MHz, and

13.56MHz (RX01-Series) at power levels up to 10000 Watts. The RX01 and LX01-Series RF

Power Supplies feature operator-accessible controls, a visual display of power supply status, and

control interfaces to the user’s processing system. Other RF Power Supply features are listed

below:

· Packages: R/L101, R/L301, R/L101MKII, R/L301MKII: ½ Rack, 3U High Package

R/L601, R/L1001: ½ Rack, 4U High Package

R/L2001, R/L3001: 19” Rack, 4U High Package

R5001: 19” Rack, 5U High Package

R8001, R10001: 19” Rack, 6U High Package

· Flexible AC Mains voltage:

R101, R/L301: 90-140VAC or 190-264VAC, selectable via transformer taps

R/L101MKII: 90-140VAC or 190-264VAC, universal input, no taps to configure.

R/L301MKII: 90-140VAC or 190-264VAC, universal input, no taps to configure.

R/L601: 90-140VAC or 190-264VAC, universal input, no transformer taps to configure

R/L1001: 190-264VAC, no transformer taps to configure.

R/L2001, R/L3001, R5001: 190-264VAC, no transformer taps to configure.

R8001, R10001: 190-264VAC, no transformer taps to configure

· User programmable 100 to 460KHz synthesized internal frequency source (L-Series)

· User programmable 1.7MHz to 2.1MHz synthesized internal frequency source (R-Series)

· Crystal-Controlled fixed frequency (R-Series)

· Programmable Variable Frequency Tuning. (1.7-2.1MHz R-Series, L-Series Models)

· Bright, easy to read 4 Line Vacuum Fluorescent Display, capable of displaying Forward

and Reflected RF Power, Control Mode, Power Supply status, and RF or DC Probe

Voltage.

· Front panel controls for RF On/Off, mode selection, and programming

· Front Panel, Analog, and Serial control interfaces

· Forward Power and Load (Net) Power Leveling

· Scaleable Forward and Reflected power metering

· Scalable RF and DC Probe Voltage display

· Remote control operation via analog system interface connector

· Computer Control via RS-232/422/485 serial interface

· Common Exciter input and output

· Voltage Probe Inverter option available (100 Watt and 300 Watt models)

· Air Cooling (100-1000 Watt models)

· Water Cooling (models over 1000 Watts)

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Seren IPS Inc.

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SEREN R301 Operator's Manual Page 11

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