
RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL
TABLE OF CONTENTS
Serial Interface Wiring …………………………………………………………….. 98
Equipotential Bonding Terminal …………………………………………………….. 99
Valve Connector ……………………………………………………………………... 100
Valve Connector Pin List ………………………………………………………….. 100
Coolant Water IN Port ……………………………………………………………….. 101
Coolant Water OUT Port …………………………………………………………….. 101
Typical Interface Connections..………………………………………………..………... 102
Basic Analog Interfacing……………………………………………………..………. 102
External Feedback with Probe Inverter Option (Models R101, R101MKII,
L101MKII, R301, R301MKII, L301, L301MKII only) ……………………………..
103
Typical System Configuration ….……………………………………………….….…... 105
Maintenance..……………………………………………………………………..……... 106
Problem Solving and Front Panel Alarm Messages ..…………………………..………. 107
Technical Data …………...……………………………………………………...……… 111
RF Power Supply Identification ………………………………………………...……. 111
Specifications: R101……..………………………….…………………………...…… 112
Specifications: R101MKII ……………………………………………………...……. 118
Specifications: R301 …………………………………………………………….…… 121
Specifications: R301MKII……………………………………………………………. 124
Specifications: L301 …………………………………………………………………. 127
Specifications: L301MKII …………………………………………………………… 130
Specifications: R601 ………………………………….……………………………… 133
Specifications: L601 ……………………………………………….………………… 136
Specifications: R1001 ……………………………………………...………………… 139
Specifications: R1001W …………………………………...………………………… 142
Specifications: L1001 …………………………………………...…………………… 146
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Seren IPS Inc.
6100220000 Rev. 1.09
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