SEREN R301 Operator's Manual download pdf (Page 207)

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL

Glossary of Terms

A Amperes, a measurement unit of current

Alternating Current

“Analog”

Industry term for a vacuum chamber used in plasma processing

equipment.

Common Exciter

(CEX)

A method of using an external frequency source to synchronize

the outputs of RF Power Supplies in a multi-power supply

system.

Current

Industry term for D-Subminiature connector

Equipotential Bond

Equipotential Bonding

Equipotential bonding (often referred to as grounding) is used

to control RF circulating currents within a system. For

regulatory purposes, it is not a “Protective Earth” or “Safety

Ground”, even though it may be bonded to the “Protective

Earth” or “Safety Ground” within the equipment or user’s

facility.

Exciter A Radio Frequency source. RF Power Supplies amplify a RF

signal source. The RF frequency signal source may be

internally generated or externally supplied. (see Common

Exciter).

Forward Power

Leveling

FWD Abbreviation, “FORWARD”

KHz Kilo Hertz, a measurement unit of frequency (1000 Hertz)

Volt-Amperes

Load (net) Power

Leveling

(Forward Power) – (Reflected Power) = Net Power

Using the calculated Net Power as the feedback source for

power leveling (regulation).

MHz Mega Hertz, a measurement unit of frequency (1,000,000

Hertz)

mV Milli-Volts, a measurement unit of Voltage, equal to 1/1000 of

a Volt.

Net Power The difference between forward power and reflected power.

ANLG Abbreviation,

Chamber

CPU Central Processing Unit: computer

DC Direct

D-Sub

Using the internal Forward Power sensor as the feedback

source for power leveling (regulation).

KVA Kilo

Matchbox Industry term for an impedance matching network

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Seren IPS Inc.

6100220000 Rev. 1.09

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SEREN R301 Operator's Manual Page 207

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